Standards Calibration – Standard step

Standard-calibration

Nanuler Calibration Standard

This versatile calibration standard is designed for the calibration of AFM, SEM, optical and mechanical profilers. Features include step heights, lines, grids, magnification box, and measurement structures of different tones. The characteristics are engraved in SiO2 and Si and are optionally available with a metallic coating for improved reflectivity and reduced static loads.

 

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Characteristics of the step height

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Step height

This well-marked dog bone step height structure was created to provide unique functionality for easy location. Precise and uniform thermoformed SiO2 is used for pitch heights less than 1 µm. The silicon steps are formed for characteristics from 5 to 25 µm.

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Magnification box

Four concentric boxes (height of 2 µm, 5 µm, 10 µm and 50 µm) can be used to check the magnification and x-y linearity. These structures can be used to verify magnification in the range of a few hundred to 50,000 times in SEM.

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Network

There are 4 different network configurations with steps of 3 µm, 10 µm, 20 µm and 50 µm. These structures are designed for x-y calibration of AFM, SEM, TEM and Profilers models.

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Grids

These grids can be used for the measurement of surface topography, roughness and magnification with most SPMs and profilometers available on the market. Other applications include focusing beams and defining / verifying the Z stage heights by observing the beam scattering.

 

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Multipurpose structures
These networks of circles, bars and squares of different heights (1 µm, 2 µm, 5 µm, 10 µm, 20 µm, 50 µm, 100 µm and 200 µm) can be used to monitor the size of the movement (XYZ) and provide a reference to different line widths.

Specifications

  • Step Material:  Si and SiO2
  • Nominal Step Heights:
    • SiO2 Steps: 100 nm, 200 nm, 500 nm and 1000 nm
    • Si Steps:  5 µm, 10 µm and 25 µm
  • Metal Coating: Cr coating (optional)
  • Traceability:  NIST calibrated Standards (Optional)
  • Die Size:  8.0 mm x 8.2 mm x 0.5 mm
  • Mounting Options:  On quartz substrate and metal disc

Listes

Step Height Description Step Type Metal Coating Mounted on Metal Disc Mounted on Quartz Substrate NIST Traceable Option
100 nm  100 nm SiO2 Step Height Reference SiO2
 100 nm SiO2 Step Height Reference, mounted on Quartz Substrate SiO2 Yes Yes
100 nm SiO2 Step Height Reference, mounted on Metal Disc SiO2 Yes  

Yes
 100 nm SiO2 Step Height Reference, metal coated SiO2 No
 100 nm SiO2 Step Height Reference, metal coated and mounted on Quartz Substrate SiO2 Yes Yes Yes
100 nm SiO2 Step Height Reference, metal coated and mounted on Metal Disc SiO2 Yes Yes  

Yes
200 nm  200 nm SiO2 Step Height Reference SiO2
 200 nm SiO2 Step Height Reference, mounted on Quartz Substrate SiO2 Yes Yes
200 nm SiO2 Step Height Reference, mounted on Metal Disc SiO2 Yes Yes
 200 nm SiO2 Step Height Reference, metal coated SiO2 Yes No
 200 nm SiO2 Step Height Reference, metal coated and mounted on Quartz Substrate SiO2 Yes Yes Yes
200 nm SiO2 Step Height Reference, metal coated and mounted on Metal Disc SiO2 Yes Yes  

Yes
500 nm  500 nm SiO2 Step Height Reference SiO2
 500 nm SiO2 Step Height Reference, mounted on Quartz Substrate SiO2 Yes Yes
500 nm SiO2 Step Height Reference, mounted on Metal Disc SiO2 Yes Yes
 500 nm SiO2 Step Height Reference, metal coated SiO2 Yes
 500 nm SiO2 Step Height Reference, metal coated and mounted on Quartz Substrate SiO2 Yes Yes Yes
500 nm SiO2 Step Height Reference, metal coated and mounted on Metal Disc SiO2 Yes Yes Yes
1 µm  1 µm SiO2 Step Height Reference SiO2
 1 µm SiO2 Step Height Reference, mounted on Quartz Substrate SiO2 Yes Yes
1 µm SiO2 Step Height Reference, mounted on Metal Disc SiO2 No Yes Yes
 1 µm SiO2 Step Height Reference, metal coated SiO2 Yes
 1 µm SiO2 Step Height Reference, metal coated and mounted on Quartz Substrate SiO2 Yes Yes Yes
1 µm SiO2 Step Height Reference, metal coated and mounted on Metal Disc SiO2 Yes Yes Yes
5 µm  5 µm SiO2 Step Height Reference Si
 5 µm SiO2 Step Height Reference, mounted on Quartz Substrate Si Yes Yes
10 µm  10 µm SiO2 Step Height Reference Si
 10 µm SiO2 Step Height Reference, mounted on Quartz Substrate Si Yes Yes
30 µm  30 µm SiO2 Step Height Reference Si
 30 µm SiO2 Step Height Reference, mounted on Quartz Substrate Si Yes Yes

 

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