Mechanical profilometer from nanometer to millimeter
D600
1. Programming of recipes for automated measurements
2. Low downforce
3. 200mm plate
4. Manual 360 ° rotation
5. Central aspiration
6. Double optical detector
The Alpha-Step D-600 profilometer is capable of measuring 2D and 3D step heights ranging from a few nanometers to 1200 µm. It also supports 2D and 3D roughness measurements, as well as 2D arc and stress for R & D and production environments.
The D-600 includes a motorized stage with a 200 mm sample mandrel and advanced optics with enhanced video controls.
Mechanical profilometry applications
- Step height: 2D and 3D step height
- Texture: 2D and 3D roughness and waviness
- Shape: 2D and 3D arc and shape
- Stress: 2D and 3D thin film stress
- Examination of defects: topography of the surface of 2D and 3D defects
- industries
- Universities, research laboratories and institutes
- Semiconductor and compound semiconductor
- LED: light emitting diodes
- Solar
- MEMS: micro-electro-mechanical systems
- Data storage
- automobile
- Medical equipement
- Universities, research laboratories and institutes
More info on applications
- Height of steps
- Texture: roughness and waviness
- Shape: bow and shape
- 2D and 3D thin layer stress
Profilometry from nm to mm
The Alpha-Step D-600 profilometer supports 2D and 3D measurements of step height and roughness, as well as 2D arc and stress. Innovative optical lever sensor technology offers high resolution measurements, a wide vertical range and reduced force measurement capability.
An advantage of the stylus measurement technique is that it is a direct measurement, independent of the properties of the material. The adjustable force and choice of stylus allow precise measurement of a wide variety of structures and materials. This allows you to quantify your process to determine the amount of material added or removed, as well as any change in structure by measuring roughness and stresses.
ADVANTAGES
- Recipe programming for automated measurements
- Low downforce
- 200mm frame
- Manual 360 ° rotation
- Central aspiration
- Double optical detector
- Step height: Nanometers at 1200µm
- Low strength: 0.03 to 15 mg
- Video: High resolution 5MP color camera
- Correction of the trapezoidal distortion: removes the distortion due to the side view optics
- Arc correction: removes errors due to stylus arc movement
- Compact size: small system footprint
- Software: user-friendly interface
Options
Stylus options
The Alpha-Step D-600 offers a variety of styli available to support the measurement of step height, steps with a high aspect ratio, roughness, sample bow and stress. The tip radius is between 100 nm and 50 µm and determines the lateral resolution of the measurement. The included angle ranges from 20 to 100 degrees, which specifies the maximum aspect ratio of the feature being measured. All styli are made from diamond to reduce wear and increase the lifespan of the stylus.
The Alpha-Step D-600 has a range of chucks available to meet application needs. The standard mandrel is a nickel-plated aluminum vacuum mandrel for samples up to 200 mm. A universal vacuum mandrel is also available and includes precision locating pins for samples from 50mm to 200mm. Both options support strain measurements with 3-point locators to keep the sample in a neutral position for precise bow measurements.
Insulation tables
The Alpha-Step D-600 offers table isolation and stand-alone options. The Granite Isolator ™ series offers tabletop insulation systems combining granite with high quality silicone gel to provide passive insulation. The Onyz series table insulation systems use pneumatic isolators to provide passive insulation. The TMC 63-500 series isolation table is a stand-alone steel frame table that uses pneumatic isolators to provide passive isolation.
The Alpha-Step D-600 uses the NIST traceable height standards in thin and thick layers offered by VLSI standards. The standards include an oxide step on a silicon matrix mounted on a quartz block. A step height range of 8 nm to 250 µm is available.
Apex analysis software
Apex analysis software enhances the standard data analysis capability of the D-500 with an extensive suite of leveling, filtering, step height, roughness and surface topography analysis techniques. Apex supports ISO roughness calculation methods, as well as local standards such as ASME. Apex can also serve as a reporting platform with the ability to add text, annotations and pass / fail criteria. Apex is available in eight languages.
Offline analysis software
The Alpha-Step D-600 offline software has the same data analysis capacity as the tool. This allows the user to analyze data without using the precious time of the tool.
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