Nano-indentation is a technique for characterizing local mechanical surface properties in relation to microstructures of thin films or bulk materials. In this technique, a small load is applied to a narrow point of known geometry which penetrates shallowly into the material. The penetration depth is recorded according to the load. The information collected then makes it possible to determine the nano-hardness, the Young's modulus, the wear resistance of the sample.
KLA offers a full range of high-throughput nanomechanical testers for characterizing materials and process control needs. With flexible add and upgrade options, its nanoindenters can be used for a wide range of nanoscale measurements, including hardness, young's modulus and adhesion .