Mechanical profilometer for industry
2. High resolution
3. Industry and R&D
4. Fully motorized
5. 200mm plate (optional 300mm)
6. 360 ° rotation
The P-17 is an advanced benchtop stylus profiler, based on over 40 years of experience in surface metrology. The P-17 is capable of measuring steps from a few nanometers to a millimeter, for production and research and development environments.
The system supports 2D and 3D measurements of pitch, roughness, bows and constraints for scans of up to 200 mm seamless.
Mechanical profilometry applications
- Step height: 2D and 3D step height
- Texture: 2D and 3D roughness and waviness
- Shape: 2D and 3D arc and shape
- Stress: 2D and 3D thin film stress
- Examination of defects: topography of the surface of 2D and 3D defects
- Universities, research laboratories and institutes
- Semiconductor and compound semiconductor
- LED: light emitting diodes
- MEMS: micro-electro-mechanical systems
- Data storage
- Medical equipement
- Universities, research laboratories and institutes
More info on applications
- Height of steps
- Texture: roughness and waviness
- Shape: bow and shape
- 2D and 3D thin layer stress
Profilometry dedicated to industry and R&D
The P-17 is an eighth generation tabletop optical profilometer, based on more than 40 years of experience in surface metrology. This advanced system supports 2D and 3D measurements of step height, roughness, arc and stresses for scans up to 200mm seamless. Excellent measurement stability is achieved through the combination of an UltraLite® sensor, constant force control and an ultra-flat scanning platform. Setting up the recipe is quick and easy thanks to point-and-click scene controls, top and side view optics and a high-resolution camera with optical zoom. The P-17 supports 2D or 3D measurements, with a variety of filtering, leveling and analysis algorithms that quantify the topography of the surface. Fully automated measurements are performed with pattern recognition, sequencing and feature detection.
- High resolution
- Industry and R&D
- Fully motorized
- 200mm frame (optional 300mm)
- 360 ° rotation
- Step height: Nanometers up to 1000 µm
- Low strength with constant strength control: 0.03 to 50 mg
- Scan the full diameter of the sample without sewing
- Video: High resolution 5MP color camera
- Arc correction: removes errors due to stylus arc movement
- Software: easy to use software interface
- Production capacity: Fully automated with sequencing, pattern recognition and SECS / GEM
Stylus / Channel Simulator
The P-17 OF (Open Frame) has the same capacity as the P-17, but with a larger frame to allow the loading of larger samples. The system can be configured for 300 mm wafers or with a 240 x 240 mm mandrel.
The P-17 offers a variety of styli available to support the measurement of step height, steps with a high aspect ratio, roughness, sample curvature and stresses. The tip radius is between 40 nm and 50 µm and determines the lateral resolution of the measurement. The included angle, between 20 and 100 degrees, specifies the maximum aspect ratio of the feature being measured. All styli are made from diamond to reduce wear and increase the lifespan of the stylus.
The P-17 offers a range of sample holders available to meet the needs of applications. The standard is a universal vacuum stage with precision positioning pins for samples from 50 to 200 mm. The stage supports arc and stress measurements using 3-point locators to support the sample in a neutral position for precise bow measurements. Additional options are available for solar samples, hard drives and precision sample location plates.
The P-17 offers both table and stand-alone insulation options. The Granite Isolator ™ series offers table systems combining granite with high quality silicone gel to provide passive insulation. The Onyz series table insulation systems use pneumatic isolators to provide passive insulation. The TMC 63-500 series isolation table is a stand-alone steel frame table that uses pneumatic isolators to provide passive isolation.
The P-17 uses NIST traceable step height standards, thin and thick, proposed by the VLSI standards. The standards include an oxide step on a silicon matrix mounted on a quartz block or an engraved quartz step with a chrome coating. A step height range of 8 nm to 250 µm is available.
Apex analysis software enhances the standard data analysis capability of the P-17 with an extensive suite of leveling, filtering, stage height, roughness and surface topography analysis techniques. Apex supports ISO roughness calculation methods, as well as local standards such as ASME. Apex can also serve as a reporting platform with the ability to add text, annotations and pass / fail criteria. Apex is available in eight languages.
Offline analysis software
The P-17 offline software has the same data analysis and recipe creation capabilities as the tool. This allows the user to create recipes and analyze data without using precious time.
Pattern recognition uses pre-taught patterns to automatically align the sample. This allows fully automated measurements for increased measurement stability by reducing the impact of operator errors. Pattern recognition, combined with advanced calibrations, reduces positioning errors and allows transparent transfer of recipes between systems.
SECS / GEM and HSMS
SECS / GEM and HSMS communications support factory automation systems and allow remote control of the P-17. The measurement results are automatically reported to the host SPC systems, as well as the alarms and the main calibration / configuration data. The P-17 complies with SEMI E4, E5, E30 and E37 standards.
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