Multi-site / In-situ reflectometers

The F30 brings together several instruments: it is a pre-deposition calibration tool allowing to adjust a treatment recipe before actual deposition, a real-time monitor of the thin-film deposition process, a fault sensor and a post-deposition assessment instrument for the completed multilayer structure.

For growing layers, the F30 continuously monitors the reflectance of the sample at one or more wavelengths. The optical properties of the deposited layer produce unique time-dependent interference oscillations in the reflectivity signal. The "virtual interface" analysis of these oscillations makes it easy to determine the deposition rate of the layer and the optical constants with an accuracy of 1%. As the underlying layers are automatically counted, no knowledge of the previous deposit is required.

Simultaneous measurement of the deposition rate at two or more locations reveals the uniformity of the sample. The F30 also provides an effective means of detecting the surface roughness associated with the eutectic transitions used for temperature calibration.
Measurement of static layers
For static (unchanged) layers, the F30 measures the reflectance spectrum of the sample, then analyzes this data with powerful simulation routines to determine the thickness of the layer and its optical constants. Any layer in a stack of up to four layers can be measured this way.