Optical profiler KLA Tencor

2D/ 3D Optical Profilometry

 

Optical Profiler

 

Zeta-20

The Zeta-20 benchtop optical profiler is a non-contact, 3D surface topography measurement system. The system is powered by patented ZDot™ technology and Multi-Mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, smooth to rough texture, and step heights from nanometers to millimeters.

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Optical Profiler

 

Zeta-300

The Zeta-300 optical profiler is a non-contact, 3D surface topography measurement system. The system incorporates integrated isolation options and configuration flexibility to handle larger samples. The Zeta-300 is powered by patented ZDot™ technology and Multi-Mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, smooth to rough texture, and step heights from nanometers to millimeters.

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3D surface profilers

 

MicroXAM 100

The KLA-Tencor Development Series of 3D surface profilers offer a complete optical surface profilometer and optical interferometry solution focusing on the needs of the engineering and research community. Our 3D surface profiler and optical interferometer products are designed to match the varied requirements of our customers through the delivery of full featured 3D surface profiler and optical interferometry products, integration of new technologies, and improved performance....

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3D surface profilers

 

MicroXAM 800

The MicroXAM-800 is an optical surface profiler from KLA-Tencor’s surface metrology product line. This non-contact, white light interferometer differentiates itself with an innovative yet simple user interface. ....

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Optical surface profiler

 

MicroXAM 1200

The MicroXAM is an optical surface profiler that supports a wide range of surface topography applications.

The system enables measurement of step heights for complex MEMS structures, quantificationof surface texture of biomedical devices, and control of laser texture bump profiles on hard drive disk media...

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