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MEMS Analysis Tool post-processing software provides a solution for performing detailed and precise analysis of the 3D dynamic response of MicroElectroMechanical Systems (MEMS). The data produced by Koala Acquisition & Analysis can be directly analyzed by this software to perform analysis of MEMS
MEMS geometries and movements are often complex to analyze with the presence of holes, or multiple structures. Displacements can be very small laterally and vertically, or very large compared to the structure size.
For each of these problems, MEMS Analysis Tool has a solution by providing:

3D dynamical topography decomposition into :

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• In-plane vibrations with nanometer scale resolution given by the algorithm for sub-pixel detection
• Out-of-plane vibrations with picometer scale vertical resolution
• Deformation and tilt of structures along the period of excitation

 

Frequency response :

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• Resonant frequency values
• Phase and amplitude Bode diagrams
• Fourier spectrum
• Harmonics amplitudes

 

Electrical response :

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• Comparative analysis of MEMS electrical response and 3D dynamical topography, as they are recorded synchronously by the stroboscopic module

 

Data management

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• Customization of graphics to display important features of your MEMS
• Export graphics as bitmap or text files for preparing your reports and presentations
• Easy data exportation for additional post-analysis