Profil3D - New 3D Optical Profiler

Profilm3D - New 3D Optical Profiler

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Finally, measurements of surface roughness and topography can be made with an instrument that costs less than a stylus profilometer. The Profilm3D has sub-nanometer vertical resolution, which surpasses instruments costing 3x as much. It does so by using the same state-of-the-art measurement technologies as the most sensitive optical profilers available: vertical-scanning interferometry (VSI) and phase-shifting interferometry (PSI).

The Analysis Power That You Need


Every Profilm3D comes standard with intuitive roughness, surface topography, and step-height measurement software. All common roughness parameters are supported, as is ISO 25178. Tools for removing sample shape, such as form removal and filtering, are included in the basic Profilm3D software. For even more advanced data manipulation, Filmetrics offers Profilm3D users a great deal on TrueMap, from our partners at TrueGage. Profilm3D data is, of course, also compatible with other industry-standard software analysis packages.

Others’ Options are Our Standard Features


Why pay extra for something everyone needs? An automated XY stage comes standard on every Profilm3D, as does a tip/tilt stage.

Setting a Standard with our Step-Height Standards


Each Profilm3D comes with a 10-µm step-height standard that is accurate to within 0.5%. We also offer a multi-step standard with steps of 100 nm, 2 µm, and 4 µm.

Wide Field-of-View


The Profilm3D’s exceptionally wide field-of-view - 2 mm with a 10x objective lens - and its digital zoom helps alleviate the need for multiple objective lenses for different applications, thus further reducing the overall cost of ownership. For those applications where the flexibility of multiple objective lenses is still required, manual and automatic turrets are available.

Performance Specifications


Thickness Range, VSI
50 nm - 10 mm
Thickness Range, PSI
0 - 3 μm
Sample Reflectance Range
0.05% - 100%

Mechanical Specifications


Z Range
100 mm
Piezo Range
500 μm
XY Stage Type
XY Stage Range
100 mm x 100 mm
2592 x 1944 (5 megapixels)
System Size, W x D x H
300 mm x 300 mm x 550 mm
System Weight
15 kg

Objectives 1 (Nikon CF IC Epi Plan)


8.0 x 6.8 mm
4.0 x 3.4 mm
2.0 x 1.7 mm
1.0 x 0.85 mm
0.4 x 0.34 mm
0.2 x 0.17 mm
Spatial Sampling2
3.52 μm
1.76 μm
0.88 μm
0.44 μm
0.176 μm
0.088 μm

1 Sold separately
2 Pixel size projected on sample

Further information

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