MEMS Analysis Tool

MEMS Analysis Tool



MEMS Analysis Tool post-processing software provides a solution for performing detailed and precise analysis of the 3D dynamic response of MicroElectroMechanical Systems (MEMS). The data produced by Koala Acquisition & Analysis can be directly analyzed by this software to perform analysis of MEMS
MEMS geometries and movements are often complex to analyze with the presence of holes, or multiple structures. Displacements can be very small laterally and vertically, or very large compared to the structure size.
For each of these problems, MEMS Analysis Tool has a solution by providing:

3D dynamical topography decomposition into :


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Frequency response :
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Electrical response :
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Data management
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