Marche étalon profilométrie

Step Height Calibration Standards

 

calibration

 

This multipurpose Calibration Standard is designed for calibration of AFM, SEM, Optical and Mechanical Profilers. Features include step heights, lines, grids, magnification box and spot measurement structures of different pitch. The features are etched into SiO2 and Si and are optionally available with metal coating for improved reflectivity and reduced static charges.

 

For more information contact ScienTec : j.duval@scientec.fr

 

 

Step Height Chip Features

STEP HEIGHT: This well-marked dog bone step height structure is created to provide a unique feature for ease of location. Precise and uniform thermally grown SiO2 is used for less than 1 µm step heights. Silicon steps are formed for features from 5 µm to 25 µm.
calibration
MAGNIFICATION BOXES: Four concentric boxes (2 µm , 5 µm, 10 µm and 50 µm pitches) can be used to verify magnification and x-y linearity. These structures can be used to check magnification from a few hundred to 50,000x range in SEMs.
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GRATINGS: There are 4 different grating patterns with pitches of 3 µm, 10 µm, 20 µm and 50 µm. These structures are designed for x-y calibration of AFM, SEM, TEM and Profilers.
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GRIDS: These grids can be used for surface topography, roughness, and magnification measurement with most of the SPM and Profilometers that are available in the market. Other applications include focus beams and set/verify Z stage heights by observing the beam scattering.
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MULTI-PURPOSE STRUCTURES: These circle, bar and square arrays with various pitches (1 µm, 2 µm, 5 µm, 10 µm, 20 µm, 50 µm, 100 µm and 200 µm) can be used to monitor beam spot size, stage movement (XYZ) and provide reference to various line widths.
calibration

 

 

Specifications

 

 

Step Height Product List

Step Height
Description
Step Type
Metal Coating
Mounted on Metal Disc
Mounted on Quartz Substrate
NIST Traceable Option
100 nm  100 nm SiO2 Step Height Reference SiO2
 100 nm SiO2 Step Height Reference, mounted on Quartz Substrate SiO2
Yes 
Yes 
100 nm SiO2 Step Height Reference, mounted on Metal Disc SiO2
Yes
 
Yes  
 100 nm SiO2 Step Height Reference, metal coated SiO2
No 
 100 nm SiO2 Step Height Reference, metal coated and mounted on Quartz Substrate SiO2
Yes
Yes
Yes 
100 nm SiO2 Step Height Reference, metal coated and mounted on Metal Disc SiO2
Yes
Yes
 
Yes 
200 nm  200 nm SiO2 Step Height Reference SiO2
 200 nm SiO2 Step Height Reference, mounted on Quartz Substrate SiO2
Yes
Yes 
200 nm SiO2 Step Height Reference, mounted on Metal Disc SiO2
Yes
Yes 
 200 nm SiO2 Step Height Reference, metal coated SiO2
Yes 
No 
 200 nm SiO2 Step Height Reference, metal coated and mounted on Quartz Substrate SiO2
Yes 
Yes 
Yes
200 nm SiO2 Step Height Reference, metal coated and mounted on Metal Disc SiO2
Yes
Yes
 
Yes 
500 nm  500 nm SiO2 Step Height Reference SiO2
 500 nm SiO2 Step Height Reference, mounted on Quartz Substrate SiO2
Yes
Yes 
500 nm SiO2 Step Height Reference, mounted on Metal Disc SiO2
Yes
Yes
 500 nm SiO2 Step Height Reference, metal coated SiO2
Yes 
 500 nm SiO2 Step Height Reference, metal coated and mounted on Quartz Substrate SiO2
Yes
Yes
Yes 
500 nm SiO2 Step Height Reference, metal coated and mounted on Metal Disc SiO2
Yes
Yes
Yes 
1 µm  1 µm SiO2 Step Height Reference SiO2
 1 µm SiO2 Step Height Reference, mounted on Quartz Substrate SiO2
Yes 
Yes 
1 µm SiO2 Step Height Reference, mounted on Metal Disc SiO2
No
Yes
Yes 
 1 µm SiO2 Step Height Reference, metal coated SiO2
Yes
 1 µm SiO2 Step Height Reference, metal coated and mounted on Quartz Substrate SiO2
Yes
Yes
Yes 
1 µm SiO2 Step Height Reference, metal coated and mounted on Metal Disc SiO2
Yes
Yes
Yes 
5 µm  5 µm SiO2 Step Height Reference Si
 5 µm SiO2 Step Height Reference, mounted on Quartz Substrate Si
Yes 
Yes 
10 µm  10 µm SiO2 Step Height Reference Si
 10 µm SiO2 Step Height Reference, mounted on Quartz Substrate Si
Yes
Yes 
30 µm  30 µm SiO2 Step Height Reference Si
 30 µm SiO2 Step Height Reference, mounted on Quartz Substrate Si
Yes
Yes